Wafer Automatic Optical Inspection Equipment —— Wafer Optical Inspection


SOI500/10A

Specially designed for graphic defect detection in the IC advanced packaging process, SOI500 supports 6/8/12-inch wafer. It can be applied in different processes such as OQC (Outgoing Quality Control), checking after development, etching, or plating.
   Product Features

● Lighting and imaging system

● Excellent resist residue inspection

● Smart defect analysis

● Multiple material interfaces

● Offline software

   Specifications
 Model  SOI500/10A
Wafer Size 150mm/ 200mm/ 300mm
Illumination Mode Dark field and bright field
Magnification 1X, 2X, 3.5X, 5X, 10X, 20X
Wafer Stage  X/Y/Rz axis, independent Z axis